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ZXYZ1015

Allectra

£6174.8

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DN100CF Miniax, Z-100 mm, X Y +/-12,5 mm, 4 Anschlüsse DN40CF XYZ MANIPULATOR, 100mm Z TRAVEL Motion in Vacuum • XY travel of ±12.5 mm guided with cross roller bearings. • Bakeable to 200°C. • Travelling flange 38m OD (DN40CF) with M6 tapped holes, straddled about the Y axis, 4 x DN16CF Service ports • Base flange is DN100CF • Double bolt holes on mounting flange. • Operating pressure 1 bar to 10-11 mbar • Leak rate 1 10-10 mbar ls-1 • XY Resolution 0.001 mm repeatability 0.005 mm • Z Resolution 0.005 mm repeatability 0.010 mm

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